Kodi ndi mitundu iti yomwe imagwiritsidwa ntchito pokhazikika pouma?

Ukadaulo wowuma ndi imodzi mwamachitidwe ofunikira. Mafuta owuma ndi chinthu chofunikira pakupanga semiconduc ndi gwero lofunikira la plasma etch. Magwiridwe ake amakhudza mwachindunji mtundu ndi magwiridwe antchito omaliza. Nkhaniyi imagawana kwambiri zomwe zimagwiritsidwa ntchito poyerekeza ndi mpweya wabwino pouma.

Mafuta a Fluorine: mongaCarbon Tetrafluoride (CF4), Hexafluoroeane (C2F6), Trifluorthee (CHF3) ndi zoweta (C3F8). Mageti awa amatha kutulutsa bwino ma flaorides osasunthika pomwe silika ya echi ndi mankhwala a silicon, potero amakwaniritsa kuchotsedwa kwa zinthu.

Mphepo ya chlorine-yochokera ku chlorine (cl2),Boron Trichloride (BCL3)ndi silicon Tetrachloride (SICL4). Mpweya wa chlorine wochokera ku chloride umatha kupereka ma ayoni a chloride pa njira yosinthira, yomwe imathandizira kukonza momwe kusinthira ndi kusankhira.

Mpweya wa bromine-wa bromine: monga bromine (Br2) ndi bromine iodide (ibr). Mpweya wa bromine wopangidwa bwino umatha kugwiritsa ntchito magwiridwe antchito ena, makamaka akamatalika zinthu zolimba monga Silticon Carbide.

Mipweya yochokera ku Nitrogen ndi ya mpweya: monga Nitrogen Triflooride (NF3) ndi mpweya (O2). Mipweya iyi nthawi zambiri imagwiritsidwa ntchito kusintha zomwe zili mu njira yosinthira kuti musinthe kusankhidwa ndi kutsogoleredwa.

Mipweya iyi imakwaniritsa gawo lokhazikika lazinthu kudzera mu kuphatikiza kwa zotchitcheni ndi zomwe zimachitika pakusintha kwa ma plasma. Kusankha kwa mpweya wotchedwa kumatengera mtundu wa zinthu kuti ukhale wokhazikika, zosankha za ku Etching, ndipo zomwe mukufuna.