Zamagetsimpweya wapaderandi nthambi yofunika ya mpweya wapadera. Amalowa pafupifupi pafupifupi ulalo uliwonse wopanga ma semiconductor ndipo ndi zida zofunika kwambiri popanga mafakitale apakompyuta monga mabwalo ophatikizika kwambiri, zida zowonetsera panja, ndi ma cell a solar.

Muukadaulo wa semiconductor, mipweya yokhala ndi fluorine imagwiritsidwa ntchito kwambiri. Pakadali pano, pamsika wapadziko lonse lapansi wamagesi amagetsi, mpweya wamagetsi wokhala ndi fluorine ndi pafupifupi 30% yamafuta onse. Mipweya yamagetsi yokhala ndi fluorine ndi gawo lofunikira la mpweya wapadera wamagetsi pazidziwitso zamagetsi zamagetsi. Amagwiritsidwa ntchito makamaka ngati oyeretsa ndi etching agents, ndipo amatha kugwiritsidwanso ntchito ngati dopants, zipangizo zopangira mafilimu, ndi zina zotero.

Otsatirawa ndi omwe amagwiritsidwa ntchito kwambiri ndi mpweya wokhala ndi fluorine

Nayitrojeni trifluoride (NF3): Mpweya womwe umagwiritsidwa ntchito poyeretsa ndi kuchotsa madipoziti, nthawi zambiri amagwiritsidwa ntchito kuyeretsa zipinda ndi zida.

Sulfur hexafluoride (SF6): Fluorinating agent yomwe imagwiritsidwa ntchito munjira za oxide deposition komanso ngati mpweya wotsekera kuti mudzaze media media.

Hydrogen fluoride (HF): Amagwiritsidwa ntchito pochotsa ma oxide pamwamba pa silikoni komanso ngati etchant polumikizira silicon ndi zida zina.

Nayitrogeni fluoride (NF): Amagwiritsidwa ntchito kuyika zinthu monga silicon nitride (SiN) ndi aluminium nitride (AlN).

Trifluoromethane (CHF3) nditetrafluoromethane (CF4): Amagwiritsidwa ntchito kuyika zinthu za fluoride monga silicon fluoride ndi aluminium fluoride.

Komabe, mpweya wokhala ndi fluorine uli ndi zowopsa zina, kuphatikizapo kawopsedwe, kuwononga, komanso kuyaka.

Poizoni

Mipweya ina yokhala ndi fluorine ndi yapoizoni, monga hydrogen fluoride (HF), yomwe nthunzi yake imakwiyitsa kwambiri khungu ndi thirakiti la kupuma ndipo imawononga thanzi la munthu.

Kuwononga

Hydrogen fluoride ndi ma fluoride ena amawononga kwambiri ndipo amatha kuwononga kwambiri khungu, maso ndi kupuma.

Kutentha

Ma fluoride ena amatha kuyaka ndipo amakhudzidwa ndi mpweya kapena madzi mumlengalenga kutulutsa kutentha kwakukulu ndi mpweya wapoizoni, womwe ungayambitse moto kapena kuphulika.

Kuopsa kothamanga kwambiri

Mipweya ina ya fluorinated imaphulika pansi pa kupanikizika kwakukulu ndipo imafunika chisamaliro chapadera ikagwiritsidwa ntchito ndi kusungidwa.

Kukhudza chilengedwe

Mipweya yokhala ndi fluorine imakhala ndi moyo wapamwamba kwambiri wa mumlengalenga komanso mfundo za GWP, zomwe zimakhala ndi zotsatira zowononga mumlengalenga wa ozone ndipo zingayambitse kutentha kwa dziko komanso kuwononga chilengedwe.

Kugwiritsidwa ntchito kwa mpweya m'madera omwe akutuluka monga zamagetsi akupitirirabe kuzama, kubweretsa kuchuluka kwa kufunikira kwatsopano kwa mpweya wa mafakitale. Kutengera kuchuluka kwazinthu zatsopano zopangira zida zazikulu zamagetsi monga ma semiconductors ndi mapanelo owonetsera ku China m'zaka zingapo zikubwerazi, komanso kufunikira kwakukulu kwa m'malo mwa zida zamagetsi zamagetsi, makampani opanga gasi apamagetsi apanyumba adzayambitsa. kukula kwakukulu.