Kugwiritsa ntchito tungsten hexafluoride (WF6)

Tungsten hexafluoride (WF6) imayikidwa pamwamba pa chowotcha kudzera mu njira ya CVD, kudzaza ngalande zolumikizira zitsulo, ndikupanga kulumikizana kwachitsulo pakati pa zigawo.

Tiye tikambirane kaye za plasma. Plasma ndi mtundu wa zinthu zomwe zimapangidwa ndi ma electron aulere ndi ma ion omwe amaperekedwa. Lilipo kwambiri m’chilengedwe chonse ndipo kaŵirikaŵiri limatengedwa ngati mkhalidwe wachinayi wa zinthu. Imatchedwa plasma state, yomwe imatchedwanso "Plasma". Plasma imakhala ndi magetsi apamwamba kwambiri ndipo imakhala ndi mphamvu yolumikizirana ndi gawo lamagetsi. Ndi mpweya wopangidwa ndi ionized, wopangidwa ndi ma elekitironi, ayoni, ma free radicals, tinthu tating'onoting'ono, ndi ma photons. Madzi a m'madzi a m'magaziwo ndi osakanikirana ndi magetsi osalowerera ndale omwe ali ndi tinthu tating'onoting'ono timene timagwira ntchito ndi mankhwala.

Kufotokozera molunjika ndikuti pansi pa mphamvu yamphamvu, molekyu idzagonjetsa mphamvu ya van der Waals, mphamvu ya mgwirizano wa mankhwala ndi mphamvu ya Coulomb, ndikuwonetsa mawonekedwe a magetsi osalowerera ndale lonse. Panthawi imodzimodziyo, mphamvu yapamwamba yoperekedwa ndi kunja ikugonjetsa mphamvu zitatu zomwe zili pamwambazi. Ntchito, ma electron ndi ma ion amapereka ufulu waulere, womwe ungagwiritsidwe ntchito mwachinyengo pansi pa kusintha kwa maginito, monga semiconductor etching process, CVD process, PVD ndi IMP process.

Kodi mphamvu zambiri ndi chiyani? Mwachidziwitso, kutentha kwambiri komanso ma frequency apamwamba a RF angagwiritsidwe ntchito. Nthawi zambiri, kutentha kwambiri kumakhala kosatheka kukwaniritsa. Kutentha kumeneku ndikokwera kwambiri ndipo kungakhale pafupi ndi kutentha kwa dzuwa. Kwenikweni n'zosatheka kukwaniritsa mu ndondomekoyi. Chifukwa chake, makampani nthawi zambiri amagwiritsa ntchito ma frequency apamwamba a RF kuti akwaniritse. Plasma RF imatha kufika mpaka 13MHz+.

Tungsten hexafluoride ndi plasmaized pansi pa mphamvu ya magetsi, ndiyeno nthunzi-yoikidwa ndi maginito. Ma atomu amafanana ndi nthenga za tsekwe wa dzinja ndipo amagwa pansi chifukwa cha mphamvu yokoka. Pang'onopang'ono, maatomu a W amayikidwa mu mabowo, ndipo potsirizira pake amadzazidwa Odzaza ndi mabowo kupanga zolumikizira zazitsulo. Kuphatikiza pakuyika maatomu a W m'mabowo, kodi adzayikidwanso pamwamba pa Wafer? Inde, ndithudi. Nthawi zambiri, mutha kugwiritsa ntchito njira ya W-CMP, yomwe timayitcha kuti makina akupera kuti achotse. Zili ngati kugwiritsa ntchito tsache kusesa pansi chipale chofewa chitatha. Chipale chofewa pansi chimasesedwa, koma chipale chofewa chomwe chili mu dzenje la pansi chidzatsala. Pansi, pafupifupi chimodzimodzi.