Kugwiritsa ntchito tungsten hexafluoride (WF6)

Tungsten hexafluoride (WF6) imayikidwa pamwamba pa wafer kudzera mu njira ya CVD, kudzaza ngalande zolumikizira zitsulo, ndikupanga kulumikizana kwachitsulo pakati pa zigawo.

Choyamba tiyeni tikambirane za plasma. Plasma ndi mtundu wa chinthu chomwe chimapangidwa makamaka ndi ma free electron ndi ma ion omwe ali ndi mphamvu. Imapezeka kwambiri m'chilengedwe chonse ndipo nthawi zambiri imaonedwa ngati mkhalidwe wachinayi wa chinthu. Imatchedwa plasma state, yomwe imatchedwanso "Plasma". Plasma ili ndi mphamvu zamagetsi zambiri ndipo imakhala ndi mphamvu yolumikizana ndi mphamvu yamagetsi. Ndi mpweya womwe uli ndi ayoni pang'ono, wopangidwa ndi ma electron, ma ayoni, ma free radicals, tinthu tating'onoting'ono, ndi ma photon. Plasma yokha ndi chisakanizo chamagetsi chomwe chili ndi tinthu tating'onoting'ono tomwe timagwira ntchito mwathupi komanso mwamankhwala.

Kufotokozera kosavuta ndi kwakuti pansi pa mphamvu yochuluka, molekyuluyo idzagonjetsa mphamvu ya van der Waals, mphamvu ya chemical bond ndi mphamvu ya Coulomb, ndikupereka mtundu wa magetsi osalowererapo. Nthawi yomweyo, mphamvu yochuluka yomwe imaperekedwa ndi kunja imagonjetsa mphamvu zitatu zomwe zili pamwambapa. Ntchito, ma electron ndi ma ion amapereka ufulu, womwe ungagwiritsidwe ntchito mochita kupanga pansi pa kusintha kwa mphamvu yamaginito, monga njira yopangira semiconductor, njira ya CVD, njira ya PVD ndi IMP.

Kodi mphamvu zambiri ndi chiyani? Mwachidule, kutentha kwambiri komanso ma RF ambiri angagwiritsidwe ntchito. Nthawi zambiri, kutentha kwambiri n'kosatheka kukwaniritsa. Kufunika kwa kutentha kumeneku n'kokwera kwambiri ndipo kungakhale pafupi ndi kutentha kwa dzuwa. N'kosatheka kukwaniritsa panthawiyi. Chifukwa chake, makampani nthawi zambiri amagwiritsa ntchito ma RF apamwamba kuti akwaniritse izi. Ma plasma RF amatha kufika pa 13MHz+.

Tungsten hexafluoride imayikidwa mu plasma pogwiritsa ntchito mphamvu yamagetsi, kenako nthunzi imayikidwa ndi mphamvu ya maginito. Ma atomu a W ali ofanana ndi nthenga za goose za m'nyengo yozizira ndipo amagwa pansi pogwiritsa ntchito mphamvu yokoka. Pang'onopang'ono, ma atomu a W amaikidwa m'mabowo odutsa, ndipo pamapeto pake amadzazidwa ndi mabowo odzaza kuti apange zolumikizira zachitsulo. Kuwonjezera pa kuyika ma atomu a W m'mabowo odutsa, kodi adzaikidwanso pamwamba pa Wafer? Inde, ndithudi. Kawirikawiri, mungagwiritse ntchito njira ya W-CMP, yomwe timaitcha njira yopera yamakina kuti tichotse. Ndi yofanana ndi kugwiritsa ntchito tsache kusesa pansi pambuyo pa chipale chofewa chambiri. Chipale chofewa pansi chimachotsedwa, koma chipale chofewa chomwe chili pansi chidzatsala. Pansi, pafupifupi chimodzimodzi.