Kugwiritsa ntchito tungsten Hexaftluoride (WF6)

Tungsten Hexaffluoride (WF6) amasungidwa pamwamba pa ma cvd njira, ndikudzaza zitsulo zamitundu, ndikupanga zitsulo pakati pa zigawo.

Tiyeni tikambirane za plasma poyamba. Plasma ndi mtundu wa zinthu zomwe zimapangidwa ndi ma elekitironi aulere. Zimakhalapo bwino m'chilengedwe chonse ndipo nthawi zambiri imawonedwa ngati mkhalidwe wachinayi wa zinthu. Amatchedwa plasma dziko, lotchedwanso "Magazi". Plasma ali ndi mawonekedwe owoneka bwino ndipo amakhala ndi mphamvu yophatikizira ndi gawo la electromagnetic. Ndi mpweya wosanjikiza, wopangidwa ndi ma electrons, ma iyo, ma radical a ma radical, tinthu tating'onoting'ono, ndi zithunzi. Pulogalamu yam'madziyi ndi yosakhazikika yamagetsi yokhala ndi ti ti ti ti ti ti ti ti ti ti ti ti ti ti timiclession.

Malongosoledwe owongoka ndikuti pochita mphamvu zambiri, molekyulu adzagonjetsa mphamvu ya van der ar, mphamvu yamagetsi ndi mphamvu yamagetsi, ndikuwonetsa magetsi onse. Nthawi yomweyo, mphamvu yayikulu yochokera kunja imagonjetsa mphamvu zitatuzo. Ntchito, ma elekitiro ndi ma ion amapereka boma laulere, lomwe limatha kugwiritsidwa ntchito molingana ndi kusinthana kwa maginito, monga Semiconductor

Kodi mphamvu zambiri ndi ziti? Mu lingaliro, kutentha kwambiri kutentha ndi rf kutalika kwa RF kungagwiritsidwe ntchito. Nthawi zambiri, kuthiteza kwakukulu kumakhala kosatheka kukwaniritsa. Kutentha kumeneku kumakhala kwakukulu kwambiri ndipo kumatha kukhala pafupi ndi kutentha kwa dzuwa. Ndikosatheka kukwaniritsa njirayi. Chifukwa chake, makampani nthawi zambiri amagwiritsa ntchito rf yapamwamba kwambiri kuti akwaniritse. Plasma rf imatha kufikira ngati 13mhz +.

Tungsten Hexaffluoride imapangidwa pansi pa gawo lamagetsi, kenako nthunzi yosungidwa ndi maginito. W ATTS ali ofanana ndi nthenga za chisanu ndi kugwa pansi mothandizidwa ndi mphamvu yokoka. Pang'onopang'ono, ma atomu amasungidwa kudutsa mabowo, ndipo pamapeto pake adadzaza zodzaza ndi mabowo kuti apange zitsulo zolumikizirana. Kuphatikiza pa ma atomu m'mabowo, kodi adzasungidwa padziko lapansi? Inde, inde. Nthawi zambiri, mutha kugwiritsa ntchito w-cmp, zomwe ndi zomwe timatcha njira yogaya kuti ichotse. Zilinso chimodzimodzi kugwiritsa ntchito tsache kuti lisesa pansi pambuyo pa chipale chofewa. Chipale chofewa pansi chimasefukira, koma chipale chofewa pansi chikhala. Pansi, pafupifupi chimodzimodzi.