Mafuta apadera amagetsi omwe amagwiritsidwa ntchito kwambiri - nayitrogeni trifluoride

Mipweya yapadera yamagetsi yokhala ndi fluorine imaphatikizaposulfure hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) ndi octafluoropropane (C3F8).

Ndi chitukuko cha nanotechnology ndi chitukuko chachikulu cha mafakitale a zamagetsi, zofuna zake zidzawonjezeka tsiku ndi tsiku. Nitrogen trifluoride, ngati mpweya wofunikira komanso wogwiritsidwa ntchito kwambiri pamagetsi pakupanga ndi kukonza mapanelo ndi ma semiconductors, ali ndi msika waukulu.

Monga mtundu wa gasi wapadera wokhala ndi fluorine,nayitrogeni trifluoride (NF3)ndi magetsi apadera a gasi omwe ali ndi msika waukulu kwambiri. Imakhala yolowera m'madzi kutentha kwachipinda, yogwira kwambiri kuposa mpweya pa kutentha kwakukulu, yokhazikika kuposa fluorine, komanso yosavuta kuigwira. Nitrogen trifluoride imagwiritsidwa ntchito makamaka ngati plasma etching gasi komanso choyeretsera chipinda chochitira, ndipo ndiyoyenera kupanga tchipisi ta semiconductor, mawonedwe owoneka bwino, ulusi wamaso, ma cell a photovoltaic, ndi zina zambiri.

Poyerekeza ndi mpweya wina wamagetsi wokhala ndi fluorine,nayitrogeni trifluorideali ndi ubwino wa kudya anachita ndi mkulu dzuwa. Makamaka pakuyika kwa zida zokhala ndi silicon monga silicon nitride, imakhala ndi liwiro lalikulu komanso kusankha bwino, osasiya zotsalira pamwamba pa chinthu chokhazikika. Imakhalanso yabwino kwambiri yoyeretsa ndipo ilibe kuipitsidwa pamwamba, yomwe ingakwaniritse zosowa za ndondomekoyi.