Makampani a semiconductor m'dziko lathu komanso makampani opanga magulu amakhalabe otukuka kwambiri. Nitrogen trifluoride, ngati mpweya wofunikira komanso waukulu kwambiri wamagetsi pakupanga ndi kukonza mapanelo ndi ma semiconductors, ali ndi msika waukulu.
Zomwe zimagwiritsidwa ntchito nthawi zambiri zimakhala ndi mipweya yapadera yamagetsi ya fluorine yomwe imaphatikizaposulfure hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) ndi octafluoropropane (C3F8). Nitrogen trifluoride (NF3) amagwiritsidwa ntchito makamaka ngati gwero la fluorine la hydrogen fluoride-fluoride gas high-energy chemical lasers. Gawo lothandiza (pafupifupi 25%) la mphamvu zomwe zimachitika pakati pa H2-O2 ndi F2 zitha kutulutsidwa ndi ma radiation a laser, kotero ma laser a HF-OF ndi ma lasers odalirika kwambiri pakati pa ma lasers amankhwala.
Nitrogen trifluoride ndi mpweya wabwino kwambiri wa plasma etching mumakampani a microelectronics. Pa etching silicon ndi silicon nitride, nayitrogeni trifluoride imakhala ndi kuchuluka kwa etching komanso kusankha kuposa mpweya wa tetrafluoride ndi kusakaniza kwa carbon tetrafluoride ndi mpweya, ndipo ilibe kuipitsa pamwamba. Makamaka etching wa Integrated dera zipangizo ndi makulidwe zosakwana 1.5um, nayitrogeni trifluoride ali kwambiri etching mlingo ndi selectivity, osasiya zotsalira pamwamba pa chinthu chokhazikika, komanso ndi wabwino kwambiri kuyeretsa wothandizira. Ndi chitukuko cha nanotechnology ndi chitukuko chachikulu cha mafakitale a zamagetsi, zofuna zake zidzawonjezeka tsiku ndi tsiku.
Monga mtundu wa gasi wapadera wokhala ndi fluorine, nitrogen trifluoride (NF3) ndiye chinthu chachikulu kwambiri pamagetsi apadera pamsika pamsika. Imakhala mopanda mankhwala kutentha kwa chipinda, yogwira ntchito kwambiri kuposa mpweya, imakhala yokhazikika kuposa fluorine, komanso yosavuta kuigwira pa kutentha kwakukulu.
Nayitrogeni trifluoride imagwiritsidwa ntchito makamaka ngati plasma etching gasi ndi chochitira chipinda choyeretsera, choyenera kupanga minda monga tchipisi ta semiconductor, zowonetsera lathyathyathya, ulusi wopenya, ma cell a photovoltaic, ndi zina zambiri.
Poyerekeza ndi ena fluorine munali mpweya pakompyuta, nayitrogeni trifluoride ali ubwino anachita mofulumira ndi dzuwa mkulu, makamaka etching wa zinthu pakachitsulo munali monga pakachitsulo nitride, ali mkulu etching mlingo ndi selectivity, osasiya zotsalira pamwamba pa chinthu zokhazikika, komanso ndi wabwino kwambiri kuyeretsa wothandizila, ndipo ndi zosowa za pamwamba ndi processing angathe kukwaniritsa.
Nthawi yotumiza: Dec-26-2024