Kuchuluka Kwambiri kwa Gasi Wapadera Wamagetsi - Nitrogen Trifluoride NF3

Makampani opanga ma semiconductor ndi ma panel mdziko lathu akusungabe chitukuko chapamwamba. Nayitrogeni trifluoride, monga mpweya wapadera wamagetsi wofunikira kwambiri komanso waukulu kwambiri popanga ndi kukonza ma panel ndi ma semiconductor, ili ndi malo ambiri pamsika.

Mpweya wapadera wamagetsi womwe umagwiritsidwa ntchito kwambiri wokhala ndi fluorine umaphatikizaposulfure hexafluoride (SF6)tungsten hexafluoride (WF6),tetrafluoride ya kaboni (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) ndi octafluoropropane (C3F8). Nayitrogeni trifluoride (NF3) imagwiritsidwa ntchito makamaka ngati gwero la fluorine la ma laser a hydrogen fluoride-fluoride gas high-energy chemical lasers. Gawo logwira ntchito (pafupifupi 25%) la mphamvu yochitapo kanthu pakati pa H2-O2 ndi F2 limatha kutulutsidwa ndi kuwala kwa laser, kotero ma laser a HF-OF ndi ma laser odalirika kwambiri pakati pa ma laser a mankhwala.

Nayitrogeni trifluoride ndi mpweya wabwino kwambiri wopaka plasma mumakampani opanga ma microelectronics. Pakuphika silicon ndi silicon nitride, nitrogen trifluoride imakhala ndi chiŵerengero chachikulu cha kupota ndi kusankha kuposa carbon tetrafluoride komanso chisakanizo cha carbon tetrafluoride ndi oxygen, ndipo ilibe kuipitsidwa pamwamba. Makamaka pakuphika zinthu zolumikizidwa ndi makulidwe osakwana 1.5um, nitrogen trifluoride imakhala ndi chiŵerengero chabwino kwambiri cha kupota ndi kusankha, osasiya zotsalira pamwamba pa chinthu chopaka, komanso ndi chotsukira chabwino kwambiri. Ndi chitukuko cha nanotechnology ndi chitukuko chachikulu cha makampani amagetsi, kufunikira kwake kudzawonjezeka tsiku ndi tsiku.

Monga mtundu wa mpweya wapadera wokhala ndi fluorine, nitrogen trifluoride (NF3) ndiye chinthu chachikulu kwambiri chamagetsi chapadera chomwe chimapezeka pamsika. Ndi chosagwira ntchito bwino kutentha kwa chipinda, chimagwira ntchito kwambiri kuposa mpweya, chimakhala chokhazikika kuposa fluorine, ndipo chimakhala chosavuta kuchigwiritsa ntchito kutentha kwambiri.

Nayitrogeni trifluoride imagwiritsidwa ntchito makamaka ngati mpweya wochotsa plasma ndi chotsukira chipinda chochitira zinthu, choyenera kupanga zinthu monga ma semiconductor chips, flat panel displays, optical fibers, photovoltaic cells, ndi zina zotero.

Poyerekeza ndi mpweya wina wamagetsi wokhala ndi fluorine, nitrogen trifluoride ili ndi ubwino wochitapo kanthu mwachangu komanso kugwira ntchito bwino kwambiri, makamaka pakudula zinthu zokhala ndi silicon monga silicon nitride, imakhala ndi liwiro lalikulu lodula komanso kusankha bwino, osasiya zotsalira pamwamba pa chinthu chodula, komanso ndi mankhwala abwino kwambiri oyeretsera, ndipo siipitsa pamwamba ndipo imatha kukwaniritsa zosowa za njira yokonzera.