Popanga ma semiconductor wafer foundries okhala ndi njira zotsogola kwambiri zopangira, pafupifupi mitundu 50 yamitundu yosiyanasiyana imafunika. Mipweya nthawi zambiri imagawidwa kukhala mpweya wochuluka ndimpweya wapadera.

Kugwiritsa ntchito mpweya m'mafakitale a microelectronics ndi semiconductor Kugwiritsa ntchito mpweya nthawi zonse kwakhala ndi gawo lofunikira mumayendedwe a semiconductor, makamaka njira zama semiconductor zimagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana. Kuchokera ku ULSI, TFT-LCD kupita kumakampani apano a Micro-electromechanical (MEMS), njira za semiconductor zimagwiritsidwa ntchito ngati njira zopangira zinthu, kuphatikiza etching youma, oxidation, implantation ya ion, kuyika filimu woonda, ndi zina zambiri.

Mwachitsanzo, anthu ambiri amadziwa kuti tchipisi zimapangidwa ndi mchenga, koma poyang'ana ndondomeko yonse yopangira chip, zipangizo zambiri zimafunika, monga photoresist, kupukuta madzi, zinthu zomwe zimapangidwira, mpweya wapadera, ndi zina zotero. Kupaka kumbuyo kumafunikiranso magawo, ophatikiza, mafelemu otsogolera, zida zomangira, ndi zina zambiri. Mpweya wapadera wamagetsi ndi wachiwiri waukulu kwambiri pamitengo yopangira semiconductor pambuyo pa zowotcha za silicon, zotsatiridwa ndi masks ndi photoresists.

Kuyera kwa gasi kumakhudza kwambiri magwiridwe antchito ndi zokolola, ndipo chitetezo cha gasi chimakhudzana ndi thanzi la ogwira ntchito komanso chitetezo cha ntchito ya fakitale. N'chifukwa chiyani chiyero cha gasi chimakhudza kwambiri mzere wa ndondomeko ndi ogwira ntchito? Izi sizokokomeza, koma zimatsimikiziridwa ndi makhalidwe owopsa a mpweya wokha.

Kugawika kwa mpweya wamba mumakampani a semiconductor

Gasi Wamba

Mpweya wamba umatchedwanso gasi wochuluka: umatanthawuza gasi wa mafakitale wokhala ndi chiyero chotsika kuposa 5N komanso kuchuluka kwakukulu kopanga ndi kugulitsa. Ikhoza kugawidwa mu mpweya wolekanitsa mpweya ndi mpweya wopangira malinga ndi njira zosiyanasiyana zokonzekera. Hydrogen (H2), nayitrogeni (N2), mpweya (O2), argon (A2), etc.;

Specialty Gasi

Mpweya wapadera umatanthawuza mpweya wa mafakitale umene umagwiritsidwa ntchito m'madera enaake ndipo uli ndi zofunikira za chiyero, zosiyanasiyana, ndi katundu. MakamakaSiH4, PH3, B2H6, A8H3,Mtengo wa HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, Mtengo wa BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… ndi zina zotero.

Mitundu ya Mipweya ya Spicial

Mitundu ya mpweya wapadera: zowononga, poizoni, zoyaka, zothandizira kuyaka, inert, etc.
Mipweya ya semiconductor yomwe imagwiritsidwa ntchito kwambiri imagawidwa motere:
(i) Zowononga/zowopsa:HCl, BF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2,BCl3…
(ii) Choyaka: H2,CH4,SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Zoyaka: O2, Cl2, N2O, NF3...
(iv) Wopanda: N2,CF4Chithunzi cha C2F6C4F8,SF6CO2 ndiNe,Kr, Iye…

Popanga zida za semiconductor chip, mitundu pafupifupi 50 ya mpweya wapadera (wotchedwa mpweya wapadera) imagwiritsidwa ntchito potulutsa okosijeni, kufalitsa, kuyika, etching, jekeseni, Photolithography ndi njira zina, ndipo masitepe okwana amaposa mazana. Mwachitsanzo, PH3 ndi AsH3 amagwiritsidwa ntchito ngati magwero a phosphorous ndi arsenic pakupanga ion implantation, F-based mipweya CF4, CHF3, SF6 ndi mpweya wa halogen CI2, BCI3, HBr amagwiritsidwa ntchito popanga, SiH4, NH3, N2O mu ndondomeko yowonetsera mafilimu, F2 / Kr / Ne, Kr / Ne mu ndondomeko ya photolithography.

Kuchokera pazimenezi, titha kumvetsetsa kuti mpweya wambiri wa semiconductor ndi wovulaza thupi la munthu. Makamaka, mpweya wina, monga SiH4, umadziwotcha. Malingana ngati akutuluka, adzachita mwamphamvu ndi mpweya mumlengalenga ndikuyamba kuyaka; ndipo AsH3 ndi poizoni kwambiri. Kutayikira pang'ono kulikonse kungayambitse moyo wa anthu, kotero kuti zofunikira pachitetezo cha dongosolo lowongolera pakugwiritsa ntchito mpweya wapadera ndizokwera kwambiri.

Ma semiconductors amafunikira mpweya wabwino kwambiri kuti ukhale ndi "madigiri atatu"

Kuyera kwa gasi

Zomwe zili mumlengalenga wonyansa mu gasi nthawi zambiri zimawonetsedwa ngati kuchuluka kwa chiyero cha gasi, monga 99.9999%. Nthawi zambiri, chiyero chofunikira pamagetsi apadera amagetsi chimafika pa 5N-6N, ndipo chimawonetsedwanso ndi kuchuluka kwa zonyansa zam'mlengalenga zomwe zili ppm (gawo pa miliyoni), ppb (gawo pa biliyoni), ndi ppt (gawo pa thililiyoni). Munda wamagetsi opangira semiconductor uli ndi zofunika kwambiri pakuyera ndi kukhazikika kwa mpweya wapadera, ndipo chiyero cha mpweya wapadera wamagetsi nthawi zambiri chimakhala chachikulu kuposa 6N.

Kuyanika

Zomwe zili m'madzi amtundu wa gasi, kapena kunyowa, nthawi zambiri zimawonetsedwa ndi mame, monga mame am'mlengalenga -70 ℃.

Ukhondo

Kuchuluka kwa tinthu ting'onoting'ono mu gasi, tinthu tating'onoting'ono ta µm, timawonetsedwa ndi kuchuluka kwa tinthu/M3. Kwa mpweya woponderezedwa, nthawi zambiri umawonetsedwa mu mg/m3 wa zotsalira zosalephereka zolimba, zomwe zimaphatikizapo mafuta.