Mu njira yopangira mafakitale opangira ma semiconductor wafer okhala ndi njira zopangira zapamwamba, mitundu pafupifupi 50 ya mpweya imafunika. Mipweya nthawi zambiri imagawidwa m'magulu a mpweya wambiri ndimpweya wapadera.

Kugwiritsa ntchito mpweya m'mafakitale a ma microelectronics ndi ma semiconductor Kugwiritsa ntchito mpweya nthawi zonse kwakhala ndi gawo lofunika kwambiri mu njira za semiconductor, makamaka njira za semiconductor zimagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana. Kuyambira ULSI, TFT-LCD mpaka makampani a micro-electromechanical (MEMS) omwe alipo pano, njira za semiconductor zimagwiritsidwa ntchito ngati njira zopangira zinthu, kuphatikizapo dry etching, oxidation, ion implantation, thin film deposition, ndi zina zotero.

Mwachitsanzo, anthu ambiri amadziwa kuti ma chips amapangidwa ndi mchenga, koma poyang'ana njira yonse yopangira ma chips, pakufunika zinthu zambiri, monga photoresist, polishing liquid, target material, special gas, ndi zina zotero. Ma phukusi a back-end amafunikanso ma substrates, interposer, lead frames, bonding materials, ndi zina zotero za zipangizo zosiyanasiyana. Magetsi apadera amagetsi ndi achiwiri pamtengo waukulu pakupanga ma semiconductor pambuyo pa ma silicon wafers, kutsatiridwa ndi masks ndi photoresists.

Kuyera kwa mpweya kumakhudza kwambiri magwiridwe antchito a zigawo ndi phindu la zinthu, ndipo chitetezo cha mpweya chikugwirizana ndi thanzi la ogwira ntchito komanso chitetezo cha ntchito za fakitale. Nchifukwa chiyani kuyera kwa mpweya kumakhudza kwambiri mzere wa ntchito ndi ogwira ntchito? Izi si kukokomeza, koma zimatsimikiziridwa ndi makhalidwe oopsa a mpweya wokha.

Kugawa mpweya wamba mumakampani opanga ma semiconductor

Gasi Wamba

Mpweya wamba umatchedwanso mpweya wambiri: umatanthauza mpweya wa mafakitale womwe umafunika kuyera kochepera 5N komanso kuchuluka kwakukulu kopanga ndi kugulitsa. Ukhoza kugawidwa m'magulu a mpweya wolekanitsa mpweya ndi mpweya wopangidwa motsatira njira zosiyanasiyana zokonzekera. Hydrogen (H2), nayitrogeni (N2), mpweya (O2), argon (A2), ndi zina zotero;

Gasi Wapadera

Mpweya wapadera umatanthauza mpweya wa mafakitale womwe umagwiritsidwa ntchito m'magawo enaake ndipo uli ndi zofunikira zapadera pa kuyera, kusiyanasiyana, ndi makhalidwe.SiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… ndi zina zotero.

Mitundu ya Mpweya Wonunkhira

Mitundu ya mpweya wapadera: wowononga, woopsa, woyaka, wothandiza kuyaka, wosagwira ntchito, ndi zina zotero.
Mpweya wa semiconductor womwe umagwiritsidwa ntchito kwambiri umagawidwa motere:
(i) Zowononga/zoopsa:HCl、BF3、WF6、HBr、SiH2Cl2、NH3、PH3、Cl2、BCl3...
(ii) Yoyaka: H2、CH4、SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Choyaka: O2、Cl2、N2O、NF3…
(iv) Chosagwira ntchito: N2,CF4、C2F6、C4F8、SF6CO2,Ne、KrIye…

Pakupanga ma chip a semiconductor, mitundu pafupifupi 50 yosiyanasiyana ya mpweya wapadera (wotchedwa mpweya wapadera) imagwiritsidwa ntchito mu okosijeni, kufalikira, kuyika, kuyika, kuyika, kujambula, kujambula ndi njira zina, ndipo magawo onse a ndondomekoyi amaposa mazana. Mwachitsanzo, PH3 ndi AsH3 zimagwiritsidwa ntchito ngati magwero a phosphorous ndi arsenic mu njira yoyika ma ion, mpweya wochokera ku F CF4, CHF3, SF6 ndi mpweya wa halogen CI2, BCI3, HBr nthawi zambiri amagwiritsidwa ntchito mu njira yoyika, SiH4, NH3, N2O mu njira yoyika filimu, F2/Kr/Ne, Kr/Ne mu njira yojambula.

Kuchokera pa mfundo zomwe zili pamwambapa, titha kumvetsetsa kuti mpweya wambiri wa semiconductor ndi woopsa kwa thupi la munthu. Makamaka, mpweya wina, monga SiH4, umadziyatsa wokha. Bola ukatuluka, umayatsa mpweya mwamphamvu ndi mpweya mumlengalenga ndikuyamba kuyaka; ndipo AsH3 ndi poizoni kwambiri. Kutuluka pang'ono kulikonse kungayambitse kuvulaza miyoyo ya anthu, kotero zofunikira pachitetezo cha kapangidwe ka makina owongolera kuti agwiritse ntchito mpweya wapadera ndizokwera kwambiri.

Ma semiconductor amafuna mpweya woyera kwambiri kuti akhale ndi "madigiri atatu"

Kuyera kwa mpweya

Kuchuluka kwa mpweya wodetsedwa mu mpweya nthawi zambiri kumawonetsedwa ngati kuchuluka kwa mpweya woyera, monga 99.9999%. Kawirikawiri, kufunikira kwa mpweya wapadera wamagetsi kumafika pa 5N-6N, ndipo kumawonetsedwanso ndi chiŵerengero cha voliyumu ya mpweya woyera ppm (gawo pa miliyoni), ppb (gawo pa biliyoni), ndi ppt (gawo pa trilioni). Gawo la semiconductor lamagetsi lili ndi zofunikira kwambiri pa kuyera ndi kukhazikika kwa mpweya wapadera, ndipo kuyera kwa mpweya wapadera wamagetsi nthawi zambiri kumakhala kwakukulu kuposa 6N.

Kuuma

Madzi ochepa omwe ali mu mpweya, kapena chinyezi, nthawi zambiri amaonekera mu mame, monga mame a mumlengalenga -70℃.

Ukhondo

Chiwerengero cha tinthu toipitsa mpweya, tinthu tomwe tili ndi kukula kwa tinthu ta µm, chimafotokozedwa mu tinthu tating'onoting'ono tomwe tili mu mpweya, ndipo chimafotokozedwa mu kuchuluka kwa tinthu tating'onoting'ono/M3. Pa mpweya wopanikizika, nthawi zambiri chimafotokozedwa mu mg/m3 ya zotsalira zolimba zomwe sizingapeweke, zomwe zimaphatikizapo kuchuluka kwa mafuta.