Laser gasi

Mpweya wa laser umagwiritsidwa ntchito kwambiri popangira laser annealing ndi lithography gasi mumakampani amagetsi. Kupindula ndi luso lazowonetsera mafoni a m'manja ndi kukulitsidwa kwa malo ogwiritsira ntchito, kukula kwa msika wotentha wa polysilicon kudzakulitsidwanso, ndipo njira yopangira ma laser annealing yathandiza kwambiri ntchito za TFTs. Pakati pa neon, fluorine, ndi mpweya wa argon womwe umagwiritsidwa ntchito mu ArF excimer laser popanga ma semiconductors, neon imakhala yoposa 96% ya kusakaniza kwa gasi wa laser. Ndi kukonzanso kwaukadaulo wa semiconductor, kugwiritsa ntchito ma lasers a excimer kwachulukira, ndipo kukhazikitsidwa kwaukadaulo wowonetsa kawiri kwadzetsa kufunikira kwa gasi wa neon wogwiritsidwa ntchito ndi ma lasers a ArF excimer. Kupindula ndi kukwezedwa kwa kukhazikika kwa mpweya wapadera wamagetsi, opanga zoweta adzakhala ndi malo abwino akukula msika m'tsogolomu.

Makina a Lithography ndiye zida zoyambira pakupanga semiconductor. Lithography imatanthawuza kukula kwa transistors. Kukula kogwirizana kwa unyolo wamakampani a lithography ndiye chinsinsi chakupambana kwa makina a lithography. Zida zofananira za semiconductor monga photoresist, photolithography gasi, photomask, ndi zokutira ndi zida zopanga zili ndiukadaulo wapamwamba kwambiri. Mpweya wa lithography ndi mpweya womwe makina a lithography amapanga laser yakuya ya ultraviolet. Mipweya yosiyana ya lithography imatha kupanga magwero owunikira a mafunde osiyanasiyana, ndipo kutalika kwawo kumakhudza mwachindunji kusamvana kwa makina a lithography, omwe ndi amodzi mwa minyewa yamakina a lithography. Mu 2020, malonda onse padziko lonse lapansi a makina a lithography adzakhala mayunitsi 413, omwe ASML amagulitsa mayunitsi 258 amawerengera 62%, Canon yogulitsa mayunitsi 122 ndi 30%, ndipo malonda a Nikon 33 amawerengera 8%.