Mpweya wa laser

Mpweya wa laser umagwiritsidwa ntchito makamaka pa laser annealing ndi lithography gasi mumakampani amagetsi. Popindula ndi luso la mafoni a m'manja komanso kukulitsa madera ogwiritsira ntchito, kukula kwa msika wa polysilicon wotentha pang'ono kudzakulitsidwa kwambiri, ndipo njira yochepetsera kutentha kwa laser yasintha kwambiri magwiridwe antchito a TFTs. Pakati pa mpweya wa neon, fluorine, ndi argon womwe umagwiritsidwa ntchito mu ArF excimer laser popanga ma semiconductors, neon imakhala ndi zoposa 96% ya kusakaniza kwa mpweya wa laser. Ndi kukonzedwa kwa ukadaulo wa semiconductor, kugwiritsa ntchito ma excimer lasers kwawonjezeka, ndipo kuyambitsa ukadaulo wowonetsa kawiri kwapangitsa kuti pakhale kufunikira kwakukulu kwa mpweya wa neon womwe umadyedwa ndi ma ArF excimer lasers. Popindula ndi kukwezedwa kwa malo a mpweya wapadera wamagetsi, opanga m'nyumba adzakhala ndi malo abwino okulira pamsika mtsogolo.

Makina a Lithography ndiye chida chachikulu chopangira ma semiconductor. Lithography imatanthauzira kukula kwa ma transistors. Kukula kogwirizana kwa unyolo wa makampani a lithography ndiye chinsinsi cha kupita patsogolo kwa makina a lithography. Zipangizo zofanana za semiconductor monga photoresist, gasi wa photolithography, photomask, ndi zokutira ndi zida zopangira zili ndi ukadaulo wapamwamba. Gasi wa Lithography ndiye mpweya womwe makina a lithography amapanga laser yakuya ya ultraviolet. Mpweya wosiyanasiyana wa lithography ukhoza kupanga magwero a kuwala kwa mafunde osiyanasiyana, ndipo mafunde awo amakhudza mwachindunji kugawanika kwa makina a lithography, omwe ndi amodzi mwa ma cores a makina a lithography. Mu 2020, malonda onse padziko lonse lapansi a makina a lithography adzakhala mayunitsi 413, omwe ASML yogulitsa mayunitsi 258 inali 62%, Canon yogulitsa mayunitsi 122 inali 30%, ndipo Nikon yogulitsa mayunitsi 33 inali 8%.