Mpweya wapaderazosiyana ndi zonsempweya wa mafakitalechifukwa chakuti ali ndi ntchito zapadera ndipo amagwiritsidwa ntchito m'magawo enaake. Ali ndi zofunikira zenizeni za kuyera, kuchuluka kwa zodetsa, kapangidwe kake, ndi katundu wa thupi ndi mankhwala. Poyerekeza ndi mpweya wa mafakitale, mpweya wapadera ndi wosiyanasiyana kwambiri koma uli ndi kupanga kochepa komanso kuchuluka kwa malonda.

Thempweya wosakanikiranandimpweya woyezera muyezoMpweya wosakaniza nthawi zambiri umagawidwa m'magulu awiri: mpweya wosakaniza wamba ndi mpweya wosakaniza wamagetsi.

Mpweya wosakaniza wamba ndi:mpweya wosakaniza wa laser, kuzindikira zida zosakaniza mpweya, kuwotcherera mpweya wosakaniza, kusunga mpweya wosakaniza, magetsi osakaniza magetsi, kafukufuku wazachipatala ndi zamoyo, kupha tizilombo toyambitsa matenda ndi kuyeretsa mpweya wosakaniza, alamu ya zida zosakaniza mpweya, mpweya wosakaniza wa kuthamanga kwambiri, ndi mpweya wopanda mpweya.

Zosakaniza zamagetsi zimaphatikizapo zosakaniza za mpweya wa epitaxial, zosakaniza za mpweya wa chemical vapor deposition, zosakaniza za mpweya wa doping, zosakaniza za mpweya wa etching, ndi zosakaniza zina zamagetsi zamagetsi. Zosakaniza zamagetsizi zimagwira ntchito yofunika kwambiri m'mafakitale a semiconductor ndi microelectronics ndipo zimagwiritsidwa ntchito kwambiri popanga ma large-scale integrated circuit (LSI) ndi very large-scale integrated circuit (VLSI), komanso popanga zida za semiconductor.

Mitundu 5 ya mpweya wosakaniza zamagetsi ndi yomwe imagwiritsidwa ntchito kwambiri

Kupaka mpweya wosakaniza ndi doping

Pakupanga zida za semiconductor ndi ma circuits ophatikizidwa, zinthu zina zosafunika zimalowetsedwa mu zinthu za semiconductor kuti zipereke mphamvu ndi kukana komwe kumafunikira, zomwe zimathandiza kupanga ma resistors, PN junctions, zigawo zobisika, ndi zinthu zina. Mpweya womwe umagwiritsidwa ntchito pochita doping umatchedwa mpweya wa dopant. Mpweya umenewu umaphatikizapo makamaka arsine, phosphine, phosphorous trifluoride, phosphorous pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, ndi diborane. Gwero la dopant nthawi zambiri limasakanizidwa ndi mpweya wonyamulira (monga argon ndi nayitrogeni) mu kabati yoyambira. Mpweya wosakanikiranawo umalowetsedwa nthawi zonse mu uvuni wofalikira ndipo umazungulira wafer, ndikuyika dopant pamwamba pa wafer. Kenako dopant imachitapo kanthu ndi silicon kuti ipange chitsulo cha dopant chomwe chimasamuka kupita ku silicon.

Mpweya wosakaniza wa kukula kwa epitaxial

Kukula kwa Epitaxial ndi njira yoyika ndi kukulitsa chinthu chimodzi cha kristalo pamwamba pa substrate. Mu makampani opanga semiconductor, mpweya womwe umagwiritsidwa ntchito kukulitsa gawo limodzi kapena angapo la zinthu pogwiritsa ntchito chemical vapor deposition (CVD) pa substrate yosankhidwa bwino umatchedwa epitaxial gases. Mipweya yodziwika bwino ya silicon epitaxial imaphatikizapo dihydrogen dichlorosilane, silicon tetrachloride, ndi silane. Imagwiritsidwa ntchito makamaka poika epitaxial silicon deposition, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, ndi amorphous silicon film deposition ya maselo a dzuwa ndi zida zina zowunikira kuwala.

Mpweya woika ma ion

Mu kupanga zida za semiconductor ndi ma circuit ophatikizidwa, mpweya womwe umagwiritsidwa ntchito poika ma ion umatchedwa mpweya woika ma ion. Zonyansa za ion (monga boron, phosphorous, ndi arsenic ions) zimafulumizitsidwa kufika pamlingo wapamwamba wa mphamvu zisanaikidwe mu substrate. Ukadaulo woika ma ion umagwiritsidwa ntchito kwambiri polamulira mphamvu yamagetsi. Kuchuluka kwa zonyansa zomwe zaikidwa kumatha kudziwika poyesa mphamvu ya ion beam. Mpweya woika ma ion nthawi zambiri umakhala ndi phosphorous, arsenic, ndi boron gases.

Kupaka mpweya wosakaniza

Kudula ndi njira yodula pamwamba pa chinthu chokonzedwa (monga filimu yachitsulo, filimu ya silicon oxide, ndi zina zotero) pa chinthu chomwe sichimaphimbidwa ndi photoresist, pamene akusunga malo omwe amaphimbidwa ndi photoresist, kuti apeze mawonekedwe ofunikira pa chinthucho.

Kusakaniza kwa Mpweya Wothira Nthunzi wa Mankhwala

Kuyika nthunzi ya mankhwala (CVD) kumagwiritsa ntchito mankhwala osasunthika kuti aike chinthu chimodzi kapena chophatikizana kudzera mu nthunzi ya mankhwala. Iyi ndi njira yopangira filimu yomwe imagwiritsa ntchito nthunzi ya mankhwala. Mpweya wa CVD womwe umagwiritsidwa ntchito umasiyana malinga ndi mtundu wa filimu yomwe ikupangidwa.