Mipweya yapaderaamasiyana wambampweya wa mafakitalechifukwa ali ndi ntchito zapadera ndipo amagwiritsidwa ntchito m'madera enaake. Iwo ali ndi zofunikira zenizeni za chiyero, zonyansa, kapangidwe kake, ndi thupi ndi mankhwala. Poyerekeza ndi mpweya wamakampani, mipweya yapadera imakhala yosiyana siyana koma imakhala yocheperako komanso yogulitsa.

Thempweya wosakanikiranandimpweya woyezera bwinozomwe timagwiritsa ntchito nthawi zambiri ndi zigawo zofunika za mpweya wapadera. Mipweya yosakanizidwa nthawi zambiri imagawidwa kukhala mpweya wosakanikirana ndi mpweya wosakanikirana wamagetsi.

Mipweya yambiri yosakanikirana ikuphatikizapo:laser wosakaniza gasi, Kuzindikira kwa zida gasi wosakanikirana, kuwotcherera gasi wosakanizidwa, kusungirako gasi wosakanizika, gwero lamagetsi osakanikirana, kafukufuku wamankhwala ndi bioloji gasi wosakanizidwa, kupha tizilombo toyambitsa matenda ndi kutsekereza gasi wosakanizika, alamu yamagetsi osakanikirana, gasi wosakanikirana kwambiri, komanso mpweya wa zero.

Kusakaniza kwa gasi wamagetsi kumaphatikizapo kusakaniza kwa gasi wa epitaxial, kusakaniza kwa mpweya wa vapor deposition, kusakaniza kwa gasi wa doping, kusakaniza kwa gasi wa etching, ndi zosakaniza zina zamagetsi zamagetsi. Zosakaniza za gasizi zimagwira ntchito yofunika kwambiri m'mafakitale opangira ma semiconductor ndi ma microelectronics ndipo amagwiritsidwa ntchito kwambiri pamagawo akulu ophatikizika (LSI) komanso kupanga makina ophatikizika kwambiri (VLSI), komanso kupanga zida za semiconductor.

5 Mitundu yamagetsi osakanikirana amagetsi ndi omwe amagwiritsidwa ntchito kwambiri

Doping gasi wosakanikirana

Popanga zida za semiconductor ndi mabwalo ophatikizika, zonyansa zina zimalowetsedwa mu zida za semiconductor kuti zipereke ma conductivity omwe amafunidwa komanso kukana, zomwe zimapangitsa kuti pakhale zopinga, zolumikizira za PN, zigawo zokwiriridwa, ndi zida zina. Mipweya yomwe imagwiritsidwa ntchito popanga doping imatchedwa mpweya wa dopant. Mipweya imeneyi makamaka ikuphatikizapo arsine, phosphine, phosphorous trifluoride, phosphorous pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, ndi diborane. Gwero la dopant nthawi zambiri limasakanizidwa ndi mpweya wonyamula (monga argon ndi nayitrogeni) mu kabati yoyambira. Mpweya wosakanizikawo umabayidwa mosalekeza mung'anjo yoyatsira moto ndikuzungulira mozungulira, ndikuyika dopant pamwamba pake. Dopant kenaka imakhudzidwa ndi silicon kupanga chitsulo cha dopant chomwe chimasamukira mu silicon.

Epitaxial kukula gasi osakaniza

Kukula kwa Epitaxial ndi njira yoyika ndikukulitsa chinthu chimodzi cha kristalo pamtunda wapansi. M'makampani a semiconductor, mipweya yomwe imagwiritsidwa ntchito kukulitsa gawo limodzi kapena zingapo zakuthupi pogwiritsa ntchito mankhwala a vapor deposition (CVD) pagawo losankhidwa bwino limatchedwa epitaxial gesi. Mipweya yodziwika bwino ya silicon epitaxial imaphatikizapo dihydrogen dichlorosilane, silicon tetrachloride, ndi silane. Amagwiritsidwa ntchito makamaka pa epitaxial silicon deposition, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, and amorphous silicon film deposition for solar cell and other photosensitive devices.

Ion implantation gasi

Pazida za semiconductor komanso kupanga magawo ophatikizika, mipweya yomwe imagwiritsidwa ntchito pakuyika kwa ion imatchedwa kuti ion implantation mpweya. Zonyansa za ionized (monga boron, phosphorous, ndi ayoni arsenic) zimafulumizitsidwa kupita kumlingo wapamwamba kwambiri zisanakhazikitsidwe mu gawo lapansi. Ukadaulo wa implantation wa ion umagwiritsidwa ntchito kwambiri kuwongolera mphamvu yamagetsi. Kuchuluka kwa zonyansa zobzalidwa zitha kuzindikirika poyesa mtengo wa ion mtengo. Mipweya yoyika ion nthawi zambiri imakhala ndi phosphorous, arsenic, ndi mpweya wa boron.

Kutulutsa gasi wosakanikirana

Etching ndi ndondomeko ya etching kutali kukonzedwa pamwamba (monga zitsulo filimu, pakachitsulo okusayidi filimu, etc.) pa gawo lapansi kuti si masked ndi photoresist, pamene kusunga dera lophimbidwa ndi photoresist, kuti apeze chofunika kujambula chitsanzo pa gawo lapansi.

Chemical Vapor Deposition Gasi Mix

Chemical vapor deposition (CVD) imagwiritsa ntchito zinthu zosasunthika kuyika chinthu chimodzi kapena kuphatikiza kudzera mumtundu wamankhwala. Iyi ndi njira yopangira filimu yomwe imagwiritsa ntchito vapor-phase chemical reaction. Mipweya ya CVD yomwe imagwiritsidwa ntchito imasiyanasiyana malinga ndi mtundu wa filimu yomwe ikupangidwa.