Epithexial (Kukula)Osakaniza gas

Mu semiconducy mafakitale, gasi yomwe imagwiritsidwa ntchito popanga imodzi kapena zingapo zazinthu ndi mankhwala opatsirana pazinthu mosamala.

Zogwiritsidwa ntchito kwambiri za Sicon Epiton epiton imaphatikizapo dichloroosilane, silicon Tetrachloride ndipomtima wa silnene. Makamaka a Epithexial Elicon, ma oxide oxide point, amorphous silicon fict ya dzuwa ndi njira zomwe zimapangidwira pansi.

Mankhwala mkangano (cvd) mafuta osakanikirana

CVD ndi njira yosungira zinthu zina ndi mankhwala omwe gawo la mpweya amagwira ntchito pogwiritsa ntchito mankhwala osakira, mwachitsanzo, njira yopanga filimu yomwe imagwiritsira ntchito mpweya wa mankhwala. Kutengera mtundu wa filimu, mankhwala opatsirana a mankhwala (cvd) omwe amagwiritsidwa ntchito ndi osiyananso.

KutsitsaMafuta osakanikirana

Popanga zigawo za semiconduction ndi zigawo zina zomwe zimaphatikizidwa, zodetsa nkhawa zina zimaperekedwa m'magulu a semiconductoction kuti iperekenso zida zofunika kuchita ndipo zigawo za PN, zoikika.

Makamaka zimaphatikizapo arezi, phosphoro, phosphorous triflooride, phosphorous pentaffede, arsenic triflooride, arsenic pentaffloria,Boron Triflooride, diborane, etc.

Nthawi zambiri, gwero la ma dupting limasakanikirana ndi mpweya wonyamula (monga Argon ndi nayitrogeni) mu gwero. Nditasakaniza, kutuluka kwa gasi kumalowetsedwa mu ng'anjo ya ng'anjoyi ndikuzungulira okwera pamalopo pabwino, kenako kubwereza ndi sinayi kupanga zitsulo zomwe zimasamukira ku Silicon.

EtangKusakaniza kwa mafuta

Kutalika ndikuti kukweza malo osinthira (monga makanema achitsulo, yicnon oxide oxide, etc.) Pa gawo lapansi popanda kuyika zithunzi zomwe zimafunikira pamtunda wankhani.

Njira zosinthira zimaphatikizanso mankhwala onyowa ndi mankhwala owuma. Mafuta omwe amagwiritsidwa ntchito popukutira mankhwala owuma amatchedwa kuti mafuta.

Mpweya wa etaling nthawi zambiri umakhala ndi mpweya (halide), mongaCarbon Tetrafluoride, nayirogeni triflooride, triffelomet, hexafluorooeane, choopsa, etc.