Kukula kwa Epitaxial (kukula)Ga Wosakanizas

Mu makampani opanga zinthu zamagetsi, mpweya womwe umagwiritsidwa ntchito kukulitsa gawo limodzi kapena angapo la zinthu pogwiritsa ntchito nthunzi ya mankhwala pa substrate yosankhidwa mosamala umatchedwa epitaxial gas.

Mpweya wa silicon epitaxial womwe umagwiritsidwa ntchito kwambiri ndi monga dichlorosilane, silicon tetrachloride ndisilaneAmagwiritsidwa ntchito makamaka poika silicon mu epitaxial, kuika silicon oxide film, kuika silicon nitride film, kuika amorphous silicon film ya ma solar cell ndi ma photoreceptor ena, ndi zina zotero. Epitaxy ndi njira yomwe kristalo imodzi imayikidwa ndikukulitsidwa pamwamba pa substrate.

Mpweya Wosakaniza wa Mankhwala Otulutsa Nthunzi (CVD)

CVD ndi njira yoyika zinthu zina ndi ma compounds pogwiritsa ntchito ma gas phase chemical reactions pogwiritsa ntchito ma volatile compounds, mwachitsanzo, njira yopangira filimu pogwiritsa ntchito ma gas phase chemical reactions. Kutengera mtundu wa filimu yomwe yapangidwa, mpweya wa chemical vapor deposition (CVD) womwe umagwiritsidwa ntchito umasiyananso.

Kugwiritsa ntchito mankhwala osokoneza bongoMpweya Wosakaniza

Popanga zida za semiconductor ndi ma circuits ophatikizidwa, zinthu zina zodetsedwa zimalowetsedwa mu zipangizo za semiconductor kuti zipatse zipangizozo mtundu wofunikira wa conductivity ndi resistivity inayake kuti zipange resistors, PN junctions, mipata yobisika, ndi zina zotero. Mpweya womwe umagwiritsidwa ntchito pochita doping umatchedwa doping gas.

Makamaka zimaphatikizapo arsine, phosphine, phosphorous trifluoride, phosphorous pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, etc.

Kawirikawiri, gwero la doping limasakanizidwa ndi mpweya wonyamulira (monga argon ndi nayitrogeni) mu kabati yoyambira. Pambuyo posakaniza, mpweyawo umalowetsedwa nthawi zonse mu uvuni wofalikira ndikuzungulira wafer, ndikuyika zinthu zopopera pamwamba pa wafer, kenako nkuchitapo kanthu ndi silicon kuti apange zitsulo zopopera zomwe zimasamuka kukhala silicon.

KudulaKusakaniza kwa Gasi

Kuduladula ndiko kudula pamwamba pa chinthu chokonzedwa (monga filimu yachitsulo, filimu ya silicon oxide, ndi zina zotero) pa chinthu chopangidwa popanda kuphimba ndi photoresist, pamene akusunga malowo ndi photoresist masking, kuti apeze chithunzi chofunikira pamwamba pa chinthu chopangidwa.

Njira zophikira zimaphatikizapo kupukutira mankhwala onyowa ndi kupukutira mankhwala ouma. Mpweya womwe umagwiritsidwa ntchito popukutira mankhwala ouma umatchedwa mpweya wophikira.

Mpweya wothira nthawi zambiri umakhala mpweya wa fluoride (halide), mongatetrafluoride ya kaboni, nitrogen trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, ndi zina zotero.