Epitaxial (kukula)Mixed Gas

M'makampani a semiconductor, mpweya womwe umagwiritsidwa ntchito pokulitsa gawo limodzi kapena zingapo zazinthu pogwiritsa ntchito nthunzi wamankhwala pagawo losankhidwa bwino limatchedwa epitaxial gas.

Nthawi zambiri silicon epitaxial mpweya monga dichlorosilane, silicon tetrachloride ndisilane. Amagwiritsidwa ntchito makamaka pa epitaxial silicon deposition, silicon oxide deposition film, silicon nitride film deposition, amorphous silicon film deposition for solar cell and photoreceptors ena, etc. Epitaxy ndi njira yomwe kristalo imodzi imayikidwa ndikukula pamwamba pa gawo lapansi.

Chemical Vapor Deposition (CVD) Mixed Gasi

CVD ndi njira yokhazikitsira zinthu zina ndi zosakaniza ndi gasi gawo la mankhwala pogwiritsa ntchito zinthu zosakhazikika, mwachitsanzo, njira yopangira filimu yogwiritsira ntchito gasi gawo la mankhwala. Kutengera ndi mtundu wa filimu yomwe imapangidwa, mpweya wa vapor deposition (CVD) womwe umagwiritsidwa ntchito ndi wosiyana.

DopingGasi Wosakaniza

Popanga zida za semiconductor ndi mabwalo ophatikizika, zonyansa zina zimayikidwa muzinthu zopangira semiconductor kuti zipereke zida zomwe zimafunikira mtundu wa conductivity ndi resistivity ena kuti apange resistors, PN junctions, zigawo zokwiriridwa, etc. Mpweya womwe umagwiritsidwa ntchito popanga doping umatchedwa doping gas.

Makamaka arsine, phosphine, phosphorous trifluoride, phosphorous pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, etc.

Nthawi zambiri, gwero la doping limasakanizidwa ndi mpweya wonyamula (monga argon ndi nayitrogeni) mu kabati yoyambira. Pambuyo kusakaniza, kutuluka kwa gasi kumalowetsedwa mosalekeza mu ng'anjo yoyatsira ndikuzungulira chophatikiziracho, ndikuyika ma dopants pamwamba pa chophikacho, kenako ndikuchitapo kanthu ndi silicon kuti apange zitsulo zopangidwa ndi doped zomwe zimasamukira ku silicon.

EtchingKusakaniza kwa Gasi

Etching ndi etch kutali processing pamwamba (monga zitsulo filimu, pakachitsulo okusayidi filimu, etc.) pa gawo lapansi popanda photoresist masking, pamene kusunga malo ndi photoresist masking, kuti apeze chofunika kujambula chitsanzo pa gawo lapansi.

Njira zowotchera zimaphatikizirapo etching yamadzi yonyowa komanso etching yamankhwala owuma. Mpweya womwe umagwiritsidwa ntchito popangira mankhwala owuma amatchedwa etching gas.

Etching mpweya nthawi zambiri fluoride mpweya (halide), mongacarbon tetrafluoride, nayitrogeni trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, etc.